JPH01148257U - - Google Patents
Info
- Publication number
- JPH01148257U JPH01148257U JP4069788U JP4069788U JPH01148257U JP H01148257 U JPH01148257 U JP H01148257U JP 4069788 U JP4069788 U JP 4069788U JP 4069788 U JP4069788 U JP 4069788U JP H01148257 U JPH01148257 U JP H01148257U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- hole
- air
- tip
- machine tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4069788U JPH01148257U (en]) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4069788U JPH01148257U (en]) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148257U true JPH01148257U (en]) | 1989-10-13 |
Family
ID=31267162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4069788U Pending JPH01148257U (en]) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148257U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107072A (ja) * | 2009-11-20 | 2011-06-02 | Rion Co Ltd | 貫通孔の検査装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586126A (ja) * | 1981-07-03 | 1983-01-13 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS62193752A (ja) * | 1986-02-19 | 1987-08-25 | Hitachi Ltd | エアマイクロ内蔵エンドミル |
-
1988
- 1988-03-28 JP JP4069788U patent/JPH01148257U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS586126A (ja) * | 1981-07-03 | 1983-01-13 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS62193752A (ja) * | 1986-02-19 | 1987-08-25 | Hitachi Ltd | エアマイクロ内蔵エンドミル |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107072A (ja) * | 2009-11-20 | 2011-06-02 | Rion Co Ltd | 貫通孔の検査装置 |
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